Assignee
SAKAI KAZUYA
JP5 patents
Top patents by PatentIndex Score
US8278916B2Oct 2, 2012
Rotational angle sensor, motor, rotational angle detector, and electric power steering system
SAKAI KAZUYA5 citations61
US9091934B2Jul 28, 2015
Mask blank, method of manufacturing the same, transfer mask, and method of manufacturing the same
SAKAI KAZUYA0 citations51
US8535855B2Sep 17, 2013
Mask blank manufacturing method, transfer mask manufacturing method, mask blank, and transfer mask
SAKAI KAZUYA1 citations51
US8450030B2May 28, 2013
Thin film evaluation method, mask blank, and transfer mask
SAKAI KAZUYA0 citations51
US9104112B2Aug 11, 2015
Mask blank, method of manufacturing the same, and transfer mask
SAKAI KAZUYA1 citations50