Assignee
SAKAKIBARA HIROKAZU
JP·4 granted patents·1 pending application·4 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0170US8697331B2Compound, polymer, and radiation-sensitive compositionSAKAKIBARA HIROKAZU·Filed 2010·Granted Apr 15, 2014·2 cites·7 claims
- 0267US8530146B2Method for forming resist patternSAKAKIBARA HIROKAZU·Filed 2012·Granted Sep 10, 2013·1 cites·6 claims
- 0359US8715901B2Resin composition for forming fine pattern and method for forming fine patternSAKAKIBARA HIROKAZU·Filed 2005·Granted May 6, 2014·1 cites·17 claims
- 0447US8722306B2Radiation-sensitive resin compositionSAKAKIBARA HIROKAZU·Filed 2008·Granted May 13, 2014·0 cites·7 claims
- 0538US2012070783A1Radiation-sensitive resin composition, polymer, and method for forming resist patternSAKAKIBARA HIROKAZU·Filed 2011·Application pending·0 cites
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