Assignee

SAKAMOTO SHINJI

JP2 patents

Top patents by PatentIndex Score

US8280632B2Oct 2, 2012

Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus

SAKAMOTO SHINJI4 citations60

US8339594B2Dec 25, 2012

Method for measuring semiconductor wafer profile and device for measuring the same used therefor

SAKAMOTO SHINJI2 citations59