Assignee
SAKAUE HIROMITSU
JP·3 granted patents·4 pending applications·6 citations·filing 2010–2012
Top patents by PatentIndex Score
7 records- 0173US8545160B2Substrate transfer apparatus and substrate transfer methodSAKAUE HIROMITSU·Filed 2010·Granted Oct 1, 2013·4 cites·7 claims
- 0267US8814489B2Substrate processing system and substrate processing methodSAKAUE HIROMITSU·Filed 2010·Granted Aug 26, 2014·2 cites·6 claims
- 0346US9011075B2Substrate processing methodSAKAUE HIROMITSU·Filed 2012·Granted Apr 21, 2015·0 cites·5 claims
- 0434US2014052286A1Object transfer method and object processing apparatusSAKAUE HIROMITSU·Filed 2012·Application pending·0 cites
- 0532US2012170999A1Load lock device and processing systemSAKAUE HIROMITSU·Filed 2010·Application pending·0 cites
- 0632US2012213615A1Target object transfer method and target object processing apparatusSAKAUE HIROMITSU·Filed 2010·Application pending·0 cites
- 0731US2013180448A1Substrate transfer device and substrate processing systemSAKAUE HIROMITSU·Filed 2012·Application pending·0 cites
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