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SAMMOURA FIRAS N

US3 patents

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US8631700B2Jan 21, 2014

Resonating sensor with mechanical constraints

SAMMOURA FIRAS N17 citations80

US8616056B2Dec 31, 2013

BAW gyroscope with bottom electrode

SAMMOURA FIRAS N18 citations80

US8215151B2Jul 10, 2012

MEMS stiction testing apparatus and method

SAMMOURA FIRAS N16 citations80