Assignee

SAMSNUNG ELECTRONICS CO LTD

KR·1 granted patent·5 citations·filing 2004–2004

Technology mixG03F1 H10P1 H10W1 Y10S1

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0148US7338885B2Alignment mark and method for manufacturing a semiconductor device having the sameSAMSNUNG ELECTRONICS CO LTD·Filed 2004·Granted Mar 4, 2008·5 cites·18 claims

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