Assignee

SANO NAOKATSU

JP·1 granted patent·2 citations·filing 2005–2005

Technology mixB81C1 B82Y1 G03F1 H10P1 Y10S1

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1 record

0158US8110322B2Method of mask forming and method of three-dimensional microfabricationSANO NAOKATSU·Filed 2005·Granted Feb 7, 2012·2 cites·15 claims

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