Assignee

SANO YASUHISA

JP·2 granted patents·11 citations·filing 2010–2010

Technology mixB24B2 H10P2 H01L1

Top patents by PatentIndex Score

2 records

0184US8912095B2Polishing method, polishing apparatus and polishing toolSANO YASUHISA·Filed 2010·Granted Dec 16, 2014·7 cites·19 claims
0276US9233449B2Polishing method, polishing apparatus and GaN waferSANO YASUHISA·Filed 2010·Granted Jan 12, 2016·4 cites·6 claims

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