Assignee
SASAJIMA RYOTA
JP·4 granted patents·19 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0193US8252701B2Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatusSASAJIMA RYOTA·Filed 2010·Granted Aug 28, 2012·16 cites·10 claims
- 0274US9039838B2Method of manufacturing semiconductor device and substrate processing apparatusSASAJIMA RYOTA·Filed 2012·Granted May 26, 2015·2 cites·10 claims
- 0363US9136114B2Method of manufacturing semiconductor device, substrate processing method, computer-readable medium with program for executing a substrate processing method, and substrate processing apparatusSASAJIMA RYOTA·Filed 2011·Granted Sep 15, 2015·1 cites·14 claims
- 0450US9096928B2Method of manufacturing semiconductor device and substrate processing apparatusSASAJIMA RYOTA·Filed 2011·Granted Aug 4, 2015·0 cites·14 claims
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