Assignee
SASAKI YUKO
JP·3 granted patents·15 citations·filing 2009–2012
Technology mixH01J3
Top patents by PatentIndex Score
3 records- 0190US8946649B2Charged particle beam device having an energy filterSASAKI YUKO·Filed 2012·Granted Feb 3, 2015·10 cites·7 claims
- 0275US8207513B2Charged particle beam apparatusSASAKI YUKO·Filed 2009·Granted Jun 26, 2012·3 cites·8 claims
- 0368US8338781B2Charged particle beam scanning method and charged particle beam apparatusSASAKI YUKO·Filed 2011·Granted Dec 25, 2012·2 cites·7 claims
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