Assignee
SATO TAKETOSHI
JP·3 granted patents·1 pending application·11 citations·filing 2009–2014
Top patents by PatentIndex Score
4 records- 0185US8590484B2Semiconductor device manufacturing method and substrate processing apparatusSATO TAKETOSHI·Filed 2011·Granted Nov 26, 2013·7 cites·4 claims
- 0269US8193101B2Substrate processing apparatus and semiconductor device manufacturing method for forming filmSATO TAKETOSHI·Filed 2009·Granted Jun 5, 2012·3 cites·5 claims
- 0362US8093158B2Semiconductor device manufacturing method and substrate processing apparatusSATO TAKETOSHI·Filed 2010·Granted Jan 10, 2012·1 cites·7 claims
- 0452US2015187611A1Substrate processing system, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumSATO TAKETOSHI·Filed 2014·Application pending·0 cites
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