Assignee
SATO TETSUJI
JP·3 granted patents·14 citations·filing 2008–2010
Top patents by PatentIndex Score
3 records- 0191US8083891B2Plasma processing apparatus and the upper electrode unitSATO TETSUJI·Filed 2010·Granted Dec 27, 2011·14 cites·13 claims
- 0245US8077761B2Data transmission and reception module, and method of adjusting reception threshold value thereofSATO TETSUJI·Filed 2008·Granted Dec 13, 2011·0 cites·8 claims
- 0337US8687343B2Substrate mounting table of substrate processing apparatusSATO TETSUJI·Filed 2010·Granted Apr 1, 2014·0 cites·7 claims
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