Assignee
SAWADA HIDETAKA
JP·6 granted patents·13 citations·filing 2009–2012
Technology mixH01J6
Top patents by PatentIndex Score
6 records- 0182US8178850B2Chromatic aberration corrector for charged-particle beam system and correction method thereforSAWADA HIDETAKA·Filed 2009·Granted May 15, 2012·7 cites·16 claims
- 0275US8541755B1Electron microscopeSAWADA HIDETAKA·Filed 2012·Granted Sep 24, 2013·3 cites·1 claims
- 0364US9793088B2Two-stage dodecapole aberration corrector for charged-particle beamSAWADA HIDETAKA·Filed 2009·Granted Oct 17, 2017·2 cites·6 claims
- 0463US8389951B2Spherical aberration corrector and method of spherical aberration correctionSAWADA HIDETAKA·Filed 2011·Granted Mar 5, 2013·1 cites·13 claims
- 0556US8168956B2Scanning transmission electron microscope and method of aberration correction thereforSAWADA HIDETAKA·Filed 2009·Granted May 1, 2012·0 cites·8 claims
- 0654US8847172B2Method for axial alignment of charged particle beam and charged particle beam systemSAWADA HIDETAKA·Filed 2011·Granted Sep 30, 2014·0 cites·7 claims
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