Assignee
SAWANO ATSUSHI
JP·2 granted patents·2 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0160US8158328B2Composition for formation of anti-reflection film, and method for formation of resist pattern using the sameSAWANO ATSUSHI·Filed 2008·Granted Apr 17, 2012·2 cites·13 claims
- 0242US8455182B2Composition for antireflection film formation and method for resist pattern formation using the compositionSAWANO ATSUSHI·Filed 2008·Granted Jun 4, 2013·0 cites·7 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →