Assignee
SCACCABAROZZI LUIGI
NL·1 granted patent·2 pending applications·0 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0139US8405825B2Method of detecting a particle and a lithographic apparatusSCACCABAROZZI LUIGI·Filed 2010·Granted Mar 26, 2013·0 cites·12 claims
- 0237US2010151394A1System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing MethodSCACCABAROZZI LUIGI·Filed 2009·Application pending·0 cites
- 0333US2014340663A1Apparatus for Monitoring a Lithographic Patterning DeviceSCACCABAROZZI LUIGI·Filed 2012·Application pending·0 cites
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