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SCHALLER MATTHIAS
DE5 patents
Top patents by PatentIndex Score
US8575041B2Nov 5, 2013
Repair of damaged surface areas of sensitive low-K dielectrics of microstructure devices after plasma processing by in situ treatment
SCHALLER MATTHIAS1 citations50
US8440579B2May 14, 2013
Re-establishing surface characteristics of sensitive low-k dielectrics in microstructure device by using an in situ surface modification
SCHALLER MATTHIAS1 citations50
US8888947B2Nov 18, 2014
Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements
SCHALLER MATTHIAS0 citations45
US8423320B2Apr 16, 2013
Method and system for quantitative inline material characterization in semiconductor production processes based on structural measurements and related models
SCHALLER MATTHIAS0 citations39
US8110498B2Feb 7, 2012
Method for passivating exposed copper surfaces in a metallization layer of a semiconductor device
SCHALLER MATTHIAS0 citations35