Assignee
SCHELLING CHRISTOPH
DE·3 granted patents·60 citations·filing 2013–2014
Top patents by PatentIndex Score
3 records- 0196US9403670B2MEMS device having a microphone structure, and method for the production thereofSCHELLING CHRISTOPH·Filed 2014·Granted Aug 2, 2016·56 cites·4 claims
- 0274US9277329B2Capacitive MEMS element including a pressure-sensitive diaphragmSCHELLING CHRISTOPH·Filed 2014·Granted Mar 1, 2016·4 cites·5 claims
- 0349US9178018B2Manufacturing method for a micromechanical component and a corresponding micromechanical componentSCHELLING CHRISTOPH·Filed 2013·Granted Nov 3, 2015·0 cites·12 claims
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