Assignee

SCHERUEBL THOMAS

DE·2 granted patents·7 citations·filing 2009–2010

Technology mixG03F2 G01N1 H10P1

Top patents by PatentIndex Score

2 records

0178US8730474B2Method and apparatus for measuring of masks for the photo-lithographySCHERUEBL THOMAS·Filed 2009·Granted May 20, 2014·7 cites·25 claims
0233US8515154B2Verification method for repairs on photolithography masksSCHERUEBL THOMAS·Filed 2010·Granted Aug 20, 2013·0 cites·20 claims

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