Assignee
SCHIMMEL HENDRIKUS GIJSBERTUS
NL·5 granted patents·5 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0162US9113539B2Radiation sourceSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2012·Granted Aug 18, 2015·2 cites·19 claims
- 0254US9310689B2Radiation source and lithographic apparatusSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2012·Granted Apr 12, 2016·1 cites·29 claims
- 0347US8319200B2Radiation source, lithographic apparatus and device manufacturing methodSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2009·Granted Nov 27, 2012·2 cites·18 claims
- 0444US8711325B2Method and system for determining a suppression factor of a suppression system and a lithographic apparatusSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2008·Granted Apr 29, 2014·0 cites·22 claims
- 0538US8232537B2Radiation source, lithographic apparatus and device manufacturing methodSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2009·Granted Jul 31, 2012·0 cites·20 claims
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