Assignee
SCHOEPPACH ARMIN
DE·3 granted patents·10 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0173US8339569B2Temperature-control device for an optical assemblySCHOEPPACH ARMIN·Filed 2011·Granted Dec 25, 2012·2 cites·15 claims
- 0270US8705006B2Method and device for connecting an optical element to a frameSCHOEPPACH ARMIN·Filed 2009·Granted Apr 22, 2014·6 cites·29 claims
- 0368US9436101B2Optical arrangement and microlithographic projection exposure apparatus including sameSCHOEPPACH ARMIN·Filed 2012·Granted Sep 6, 2016·2 cites·27 claims
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