Assignee

SCHOLZ AXEL

DE·2 granted patents·6 citations·filing 2010–2011

Technology mixG03F2 B82Y1 G01J1 G02B1 H05G1 H10P1

Top patents by PatentIndex Score

2 records

0178US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
0271US8513628B2EUV illumination system with a system for measuring fluctuations of the light sourceSCHOLZ AXEL·Filed 2010·Granted Aug 20, 2013·2 cites·21 claims

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