Assignee
SCHUSTER KARL-HEINZ
3 granted patents·3 pending applications·123 citations·filing 2004–2011
Top patents by PatentIndex Score
6 records- 0198US7495840B2Very high-aperture projection objectiveSCHUSTER KARL-HEINZ·Filed 2007·Granted Feb 24, 2009·113 cites·16 claims
- 0274US8068279B2Optical system of an illumination device of a projection exposure apparatusSCHUSTER KARL-HEINZ·Filed 2007·Granted Nov 29, 2011·10 cites·39 claims
- 0351US8325426B2Projection objective of a microlithographic projection exposure apparatusSCHUSTER KARL-HEINZ·Filed 2011·Granted Dec 4, 2012·0 cites·24 claims
- 0443US2006244938A1Microlitographic projection exposure apparatus and immersion liquid thereforeSCHUSTER KARL-HEINZ·Filed 2004·Application pending·0 cites
- 0541US2006169198A1Phase delay element and method for producing a phase delay elementSCHUSTER KARL-HEINZ·Filed 2006·Application pending·0 cites
- 0640US2006198029A1Microlithography projection objective and projection exposure apparatusSCHUSTER KARL-HEINZ·Filed 2006·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →