P

Assignee

SCIENTECH CORP

TW5 patents

Top patents by PatentIndex Score

US6148906ANov 21, 2000

Flat plate heat pipe cooling system for electronic equipment enclosure

SCIENTECH CORP175 citations90
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Substrate processing system

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Wafer processing method and carrier

SCIENTECH CORP0 citations43
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Liquid injection device

SCIENTECH CORP0 citations41
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Wafer transfer device and wafer transfer method of semiconductor manufacturing process

SCIENTECH CORP0 citations39