Assignee

SCOTNEY-CASTLE MATTHEW D

US·1 granted patent·1 citations·filing 2009–2009

Technology mixH01J1 H10P1

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0156US8288257B2Doping profile modification in P3I processSCOTNEY-CASTLE MATTHEW D·Filed 2009·Granted Oct 16, 2012·1 cites·20 claims

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