Assignee

SCS THOMSON MICROELECTRONICS S

US·1 granted patent·20 citations·filing 1997–1997

Technology mixG01P1

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1 record

0158US6289732B1Hermetically sealed semiconductor inertial sensorSCS THOMSON MICROELECTRONICS S·Filed 1997·Granted Sep 18, 2001·20 cites·12 claims

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