Assignee

SECON HALBLEITERPRODUKTIONSGER

DE·1 granted patent·33 citations·filing 1992–1992

Technology mixE05Y1 H01J1

Top patents by PatentIndex Score

1 record

0165US5489362AMethod for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energySECON HALBLEITERPRODUKTIONSGER·Filed 1992·Granted Feb 6, 1996·33 cites·10 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →