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US5 patents

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US6346460B1Feb 12, 2002

Low cost silicon substrate with impurity gettering and latch up protection and method of manufacture

SEH AMERICA25 citations90
US6262855B1Jul 17, 2001

Infrared laser beam viewing apparatus

SEH AMERICA20 citations89
US5306939AApr 26, 1994

Epitaxial silicon wafers for CMOS integrated circuits

SEH AMERICA14 citations73
US5827367AOct 27, 1998

Apparatus for improving mechanical strength of the neck section of czochralski silicon crystal

SEH AMERICA9 citations72
US6258177B1Jul 10, 2001

Apparatus for cleaning the grooves of lapping plates

SEH AMERICA11 citations68