Assignee
SEIJGER OLAV JOHANNES
NL·3 granted patents·1 citations·filing 2009–2009
Top patents by PatentIndex Score
3 records- 0155US8773640B2Inspection method and apparatusSEIJGER OLAV JOHANNES·Filed 2009·Granted Jul 8, 2014·1 cites·14 claims
- 0248US8797509B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodSEIJGER OLAV JOHANNES·Filed 2009·Granted Aug 5, 2014·0 cites·19 claims
- 0342US8922755B2Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substratesSEIJGER OLAV JOHANNES·Filed 2009·Granted Dec 30, 2014·0 cites·21 claims
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