Assignee
SEMATECH INC
US71 patents
Top patents by PatentIndex Score
US5474865ADec 12, 1995
Globally planarized binary optical mask using buried absorbers
SEMATECH INC163 citations99
US5062446ANov 5, 1991
Intelligent mass flow controller
SEMATECH INC306 citations99
US6100184AAug 8, 2000
Method of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer
SEMATECH INC236 citations98
US6037664AMar 14, 2000
Dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer
SEMATECH INC306 citations98
US5840629ANov 24, 1998
Copper chemical mechanical polishing slurry utilizing a chromate oxidant
SEMATECH INC231 citations98
US5770982AJun 23, 1998
Self isolating high frequency saturable reactor
SEMATECH INC130 citations98
US5674787AOct 7, 1997
Selective electroless copper deposited interconnect plugs for ULSI applications
SEMATECH INC838 citations98
US5504328AApr 2, 1996
Endpoint detection utilizing ultraviolet mass spectrometry
SEMATECH INC111 citations98
US5866031AFeb 2, 1999
Slurry formulation for chemical mechanical polishing of metals
SEMATECH INC108 citations97
US5846398ADec 8, 1998
CMP slurry measurement and control technique
SEMATECH INC110 citations97
US5364510ANov 15, 1994
Scheme for bath chemistry measurement and control for improved semiconductor wet processing
SEMATECH INC147 citations97
US5480747AJan 2, 1996
Attenuated phase shifting mask with buried absorbers
SEMATECH INC75 citations96
US5472561ADec 5, 1995
Radio frequency monitor for semiconductor process control
SEMATECH INC136 citations96
US5467013ANov 14, 1995
Radio frequency monitor for semiconductor process control
SEMATECH INC134 citations96
US5325019AJun 28, 1994
Control of plasma process by use of harmonic frequency components of voltage and current
SEMATECH INC110 citations96
US5159267AOct 27, 1992
Pneumatic energy fluxmeter
SEMATECH INC84 citations96
US5159264AOct 27, 1992
Pneumatic energy fluxmeter
SEMATECH INC82 citations96
US5439569AAug 8, 1995
Concentration measurement and control of hydrogen peroxide and acid/base component in a semiconductor bath
SEMATECH INC95 citations95
US5614444AMar 25, 1997
Method of using additives with silica-based slurries to enhance selectivity in metal CMP
SEMATECH INC133 citations94
US5660706AAug 26, 1997
Electric field initiated electroless metal deposition
SEMATECH INC33 citations93
US5344365ASep 6, 1994
Integrated building and conveying structure for manufacturing under ultraclean conditions
SEMATECH INC175 citations93
US7332433B2Feb 19, 2008
Methods of modulating the work functions of film layers
SEMATECH INC31 citations92
US7736954B2Jun 15, 2010
Methods for nanoscale feature imprint molding
SEMATECH INC56 citations91
US7595204B2Sep 29, 2009
Methods and systems for determining trapped charge density in films
SEMATECH INC20 citations91
US5479340ADec 26, 1995
Real time control of plasma etch utilizing multivariate statistical analysis
SEMATECH INC145 citations91
US5264040ANov 23, 1993
Rapid-switching rotating disk reactor
SEMATECH INC24 citations91
US5472811ADec 5, 1995
Phase shifting mask structure with multilayer optical coating for improved transmission
SEMATECH INC39 citations90
US5418095AMay 23, 1995
Method of fabricating phase shifters with absorbing/attenuating sidewalls using an additive process
SEMATECH INC43 citations90
US5411824AMay 2, 1995
Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging
SEMATECH INC38 citations90
US7250620B2Jul 31, 2007
EUV lithography filter
SEMATECH INC20 citations89
US5881208AMar 9, 1999
Heater and temperature sensor array for rapid thermal processing thermal core
SEMATECH INC67 citations89
US5867020AFeb 2, 1999
Capacitively coupled RF voltage probe having optimized flux linkage
SEMATECH INC48 citations89
US5834931ANov 10, 1998
RF current sensor
SEMATECH INC37 citations89
US5555902ASep 17, 1996
Submicron particle removal using liquid nitrogen
SEMATECH INC35 citations88
US5466991ANov 14, 1995
Optimized ECR plasma apparatus with varied microwave window thickness
SEMATECH INC23 citations88
US5211729AMay 18, 1993
Baffle/settling chamber for a chemical vapor deposition equipment
SEMATECH INC50 citations88
US5562530AOct 8, 1996
Pulsed-force chemical mechanical polishing
SEMATECH INC62 citations87
US5102816AApr 7, 1992
Staircase sidewall spacer for improved source/drain architecture
SEMATECH INC39 citations87
US5237878AAug 24, 1993
Apparatus and method for sampling ultra-pure chemical
SEMATECH INC26 citations85
US8829567B2Sep 9, 2014
Metal alloy with an abrupt interface to III-V semiconductor
SEMATECH INC6 citations83
US7580138B2Aug 25, 2009
Methods and systems for characterizing semiconductor materials
SEMATECH INC14 citations83
US5074421ADec 24, 1991
Quartz tube storage device
SEMATECH INC53 citations82
US9029218B2May 12, 2015
Tunneling field-effect transistor with direct tunneling for enhanced tunneling current
SEMATECH INC6 citations81
US5456758AOct 10, 1995
Submicron particle removal using liquid nitrogen
SEMATECH INC18 citations78
US5306985AApr 26, 1994
ECR apparatus with magnetic coil for plasma refractive index control
SEMATECH INC18 citations78
US8366431B2Feb 5, 2013
Partial die process for uniform etch loading of imprint wafers
SEMATECH INC5 citations74
US7855139B2Dec 21, 2010
Systems and methods for controlling the effective dielectric constant of materials used in a semiconductor device
SEMATECH INC7 citations74
US5302882AApr 12, 1994
Low pass filter for plasma discharge
SEMATECH INC13 citations73
US5178840AJan 12, 1993
Single wafer regrowth of silicon
SEMATECH INC9 citations72
US5133829AJul 28, 1992
Single wafer regrowth of silicon
SEMATECH INC14 citations72
Showing the top 50 of 71 patents by PatentIndex Score.