Assignee
SEMICONDUCTOR DIAGNOSTICS INC
US·11 granted patents·752 citations·filing 1997–2006
Top patents by PatentIndex Score
11 records- 0196US6680621B2Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage currentSEMICONDUCTOR DIAGNOSTICS INC·Filed 2001·Granted Jan 20, 2004·133 cites·62 claims
- 0296US6597193B2Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage currentSEMICONDUCTOR DIAGNOSTICS INC·Filed 2001·Granted Jul 22, 2003·129 cites·27 claims
- 0392US6569691B1Measurement of different mobile ion concentrations in the oxide layer of a semiconductor waferSEMICONDUCTOR DIAGNOSTICS INC·Filed 2000·Granted May 27, 2003·72 cites·35 claims
- 0490US7202691B2Non-contact method for acquiring charge-voltage data on miniature test areas of semiconductor product wafersSEMICONDUCTOR DIAGNOSTICS INC·Filed 2005·Granted Apr 10, 2007·32 cites·18 claims
- 0590US6114865ADevice for electrically contacting a floating semiconductor wafer having an insulating filmSEMICONDUCTOR DIAGNOSTICS INC·Filed 1999·Granted Sep 5, 2000·132 cites·19 claims
- 0690US6037797AMeasurement of the interface trap charge in an oxide semiconductor layer interfaceSEMICONDUCTOR DIAGNOSTICS INC·Filed 1997·Granted Mar 14, 2000·85 cites·20 claims
- 0788US6538462B1Method for measuring stress induced leakage current and gate dielectric integrity using corona dischargeSEMICONDUCTOR DIAGNOSTICS INC·Filed 1999·Granted Mar 25, 2003·95 cites·30 claims
- 0888US6512384B1Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltagesSEMICONDUCTOR DIAGNOSTICS INC·Filed 2000·Granted Jan 28, 2003·52 cites·33 claims
- 0967US6815974B1Determining composition of mixed dielectricsSEMICONDUCTOR DIAGNOSTICS INC·Filed 2003·Granted Nov 9, 2004·7 cites·24 claims
- 1062US7405580B2Self-calibration in non-contact surface photovoltage measurement of depletion capacitance and dopant concentrationSEMICONDUCTOR DIAGNOSTICS INC·Filed 2006·Granted Jul 29, 2008·2 cites·20 claims
- 1160US6771091B2Method and system for elevated temperature measurement with probes designed for room temperature measurementSEMICONDUCTOR DIAGNOSTICS INC·Filed 2002·Granted Aug 3, 2004·13 cites·20 claims
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