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SEMIFAB INC
US11 patents
Top patents by PatentIndex Score
US6368411B2Apr 9, 2002
Molecular contamination control system
SEMIFAB INC104 citations98
US5879458AMar 9, 1999
Molecular contamination control system
SEMIFAB INC168 citations98
US5315766AMay 31, 1994
Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
SEMIFAB INC55 citations96
US5115576AMay 26, 1992
Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
SEMIFAB INC81 citations96
US4977688ADec 18, 1990
Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
SEMIFAB INC62 citations96
US6221163B1Apr 24, 2001
Molecular contamination control system
SEMIFAB INC70 citations95
US6042651AMar 28, 2000
Molecular contamination control system
SEMIFAB INC82 citations95
US6187182B1Feb 13, 2001
Filter cartridge assembly for a gas purging system
SEMIFAB INC80 citations94
US5848933ADec 15, 1998
Docking and environmental purging system for integrated circuit wafer transport assemblies
SEMIFAB INC24 citations91
US6168085B1Jan 2, 2001
System and method for cascade control of temperature and humidity for semi-conductor manufacturing environments
SEMIFAB INC29 citations80
US6120371ASep 19, 2000
Docking and environmental purging system for integrated circuit wafer transport assemblies
SEMIFAB INC14 citations80