Assignee
SEMIGEAR INC
US13 patents
Top patents by PatentIndex Score
US7008879B2Mar 7, 2006
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry
SEMIGEAR INC391 citations95
US6827789B2Dec 7, 2004
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry
SEMIGEAR INC421 citations95
US9472531B2Oct 18, 2016
Device packaging facility and method, and device processing apparatus utilizing phthalate
SEMIGEAR INC4 citations71
US10861735B2Dec 8, 2020
Substrate support unit
SEMIGEAR INC2 citations63
US9226407B2Dec 29, 2015
Reflow treating unit and substrate treating apparatus
SEMIGEAR INC3 citations63
US7982320B2Jul 19, 2011
Arrangement for solder bump formation on wafers
SEMIGEAR INC3 citations63
US7632750B2Dec 15, 2009
Arrangement for solder bump formation on wafers
SEMIGEAR INC4 citations63
US11456192B2Sep 27, 2022
Apparatus and method for cooling substrate
SEMIGEAR INC0 citations62
US10937757B2Mar 2, 2021
Device packaging facility and method, and device processing apparatus utilizing DEHT
SEMIGEAR INC0 citations61
US10790179B2Sep 29, 2020
Alignment apparatus
SEMIGEAR INC3 citations61
US9824998B2Nov 21, 2017
Device packaging facility and method, and device processing apparatus utilizing DEHT
SEMIGEAR INC1 citations61
US9741683B2Aug 22, 2017
Device packaging facility and method, and device processing apparatus utilizing phthalate
SEMIGEAR INC1 citations50
US11315807B2Apr 26, 2022
Substrate pressing module, substrate pressing method, substrate treating apparatus including the substrate treating module, and the substrate treating method
SEMIGEAR INC0 citations39