Assignee
SEMIQUEST INC
US3 patents
Top patents by PatentIndex Score
US7846008B2Dec 7, 2010
Method and apparatus for improved chemical mechanical planarization and CMP pad
SEMIQUEST INC52 citations97
US7530880B2May 12, 2009
Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor
SEMIQUEST INC54 citations95
US7815778B2Oct 19, 2010
Electro-chemical mechanical planarization pad with uniform polish performance
SEMIQUEST INC44 citations92