Assignee

SEMITHERM

US3 patents

Top patents by PatentIndex Score

US4738618AApr 19, 1988

Vertical thermal processor

SEMITHERM394 citations93

US5000682AMar 19, 1991

Vertical thermal processor for semiconductor wafers

SEMITHERM47 citations89

US5590996AJan 7, 1997

Wafer transfer apparatus

SEMITHERM17 citations77