Assignee
SEMITOOL INC
US384 patents
Top patents by PatentIndex Score
US6976822B2Dec 20, 2005
End-effectors and transfer devices for handling microelectronic workpieces
SEMITOOL INC526 citations99
US6932892B2Aug 23, 2005
Apparatus and method for electrolytically depositing copper on a semiconductor workpiece
SEMITOOL INC226 citations99
US6638410B2Oct 28, 2003
Apparatus and method for electrolytically depositing copper on a semiconductor workpiece
SEMITOOL INC110 citations99
US6565729B2May 20, 2003
Method for electrochemically depositing metal on a semiconductor workpiece
SEMITOOL INC435 citations99
US6497801B1Dec 24, 2002
Electroplating apparatus with segmented anode array
SEMITOOL INC120 citations99
US6350319B1Feb 26, 2002
Micro-environment reactor for processing a workpiece
SEMITOOL INC88 citations99
US6309524B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC107 citations99
US6290833B1Sep 18, 2001
Method for electrolytically depositing copper on a semiconductor workpiece
SEMITOOL INC121 citations99
US6277263B1Aug 21, 2001
Apparatus and method for electrolytically depositing copper on a semiconductor workpiece
SEMITOOL INC151 citations99
US6240933B1Jun 5, 2001
Methods for cleaning semiconductor surfaces
SEMITOOL INC118 citations99
US6228232B1May 8, 2001
Reactor vessel having improved cup anode and conductor assembly
SEMITOOL INC110 citations99
US6197181B1Mar 6, 2001
Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece
SEMITOOL INC649 citations99
US6080291AJun 27, 2000
Apparatus for electrochemically processing a workpiece including an electrical contact assembly having a seal member
SEMITOOL INC388 citations99
US5947718ASep 7, 1999
Semiconductor processing furnace
SEMITOOL INC502 citations99
US5544421AAug 13, 1996
Semiconductor wafer processing system
SEMITOOL INC107 citations99
US5377708AJan 3, 1995
Multi-station semiconductor processor with volatilization
SEMITOOL INC247 citations99
US5235995AAug 17, 1993
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization
SEMITOOL INC168 citations99
US5224503AJul 6, 1993
Centrifugal wafer carrier cleaning apparatus
SEMITOOL INC113 citations99
US5222310AJun 29, 1993
Single wafer processor with a frame
SEMITOOL INC219 citations99
US6660137B2Dec 9, 2003
System for electrochemically processing a workpiece
SEMITOOL INC78 citations98
US6447232B1Sep 10, 2002
Semiconductor wafer processing apparatus having improved wafer input/output handling system
SEMITOOL INC499 citations98
US6428673B1Aug 6, 2002
Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology
SEMITOOL INC102 citations98
US6319387B1Nov 20, 2001
Copper alloy electroplating bath for microelectronic applications
SEMITOOL INC300 citations98
US6318951B1Nov 20, 2001
Robots for microelectronic workpiece handling
SEMITOOL INC180 citations98
US6309520B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC92 citations98
US6273108B1Aug 14, 2001
Apparatus and method for processing the surface of a workpiece with ozone
SEMITOOL INC93 citations98
US6267125B1Jul 31, 2001
Apparatus and method for processing the surface of a workpiece with ozone
SEMITOOL INC104 citations98
US6203582B1Mar 20, 2001
Modular semiconductor workpiece processing tool
SEMITOOL INC154 citations98
US6091498AJul 18, 2000
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC115 citations98
US5985126ANov 16, 1999
Semiconductor plating system workpiece support having workpiece engaging electrodes with distal contact part and dielectric cover
SEMITOOL INC121 citations98
US5762751AJun 9, 1998
Semiconductor processor with wafer face protection
SEMITOOL INC120 citations98
US5731678AMar 24, 1998
Processing head for semiconductor processing machines
SEMITOOL INC120 citations98
US5664337ASep 9, 1997
Automated semiconductor processing systems
SEMITOOL INC105 citations98
US5489341AFeb 6, 1996
Semiconductor processing with non-jetting fluid stream discharge array
SEMITOOL INC116 citations98
US5431421AJul 11, 1995
Semiconductor processor wafer holder
SEMITOOL INC108 citations98
US5232511AAug 3, 1993
Dynamic semiconductor wafer processing using homogeneous mixed acid vapors
SEMITOOL INC123 citations98
US5174045ADec 29, 1992
Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers
SEMITOOL INC117 citations98
US6672820B1Jan 6, 2004
Semiconductor processing apparatus having linear conveyer system
SEMITOOL INC145 citations97
US6508920B1Jan 21, 2003
Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device
SEMITOOL INC88 citations97
US6440178B2Aug 27, 2002
Modular semiconductor workpiece processing tool
SEMITOOL INC82 citations97
US6286231B1Sep 11, 2001
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC178 citations97
US6270647B1Aug 7, 2001
Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations
SEMITOOL INC134 citations97
US6254742B1Jul 3, 2001
Diffuser with spiral opening pattern for an electroplating reactor vessel
SEMITOOL INC130 citations97
US6207937B1Mar 27, 2001
Temperature control system for a thermal reactor
SEMITOOL INC84 citations97
US5678320AOct 21, 1997
Semiconductor processing systems
SEMITOOL INC87 citations97
US5658387AAug 19, 1997
Semiconductor processing spray coating apparatus
SEMITOOL INC108 citations97
US5224504AJul 6, 1993
Single wafer processor
SEMITOOL INC200 citations97
US6869487B1Mar 22, 2005
Process and apparatus for treating a workpiece such as a semiconductor wafer
SEMITOOL INC53 citations96
US6632345B1Oct 14, 2003
Apparatus and method for electrolytically depositing a metal on a workpiece
SEMITOOL INC47 citations96
US6569297B2May 27, 2003
Workpiece processor having processing chamber with improved processing fluid flow
SEMITOOL INC39 citations96
Showing the top 50 of 384 patents by PatentIndex Score.