Assignee
SEN CORP
JP·19 granted patents·1 pending application·159 citations·filing 1999–2017
Top patents by PatentIndex Score
20 records- 0195US6271620B1Acoustic transducer and method of making the sameSEN CORP·Filed 1999·Granted Aug 7, 2001·79 cites·23 claims
- 0287US9208983B2Ion generation method and ion sourceSEN CORP·Filed 2013·Granted Dec 8, 2015·8 cites·14 claims
- 0387US8692216B2Ion implantation apparatus and control method thereofSEN CORP·Filed 2013·Granted Apr 8, 2014·11 cites·34 claims
- 0486US9117630B2Insulation structure of high voltage electrodes for ion implantation apparatusSEN CORP·Filed 2014·Granted Aug 25, 2015·7 cites·23 claims
- 0586US7361892B2Method to increase low-energy beam current in irradiation system with ion beamSEN CORP·Filed 2005·Granted Apr 22, 2008·12 cites·18 claims
- 0685US9281160B2Insulation structure and insulation methodSEN CORP·Filed 2014·Granted Mar 8, 2016·7 cites·23 claims
- 0782US8952340B2High-frequency acceleration type ion acceleration and transportation apparatus having high energy precisionSEN CORP·Filed 2014·Granted Feb 10, 2015·5 cites·19 claims
- 0881US9165772B2Ion implantation method and ion implantation apparatusSEN CORP·Filed 2014·Granted Oct 20, 2015·4 cites·6 claims
- 0981US7755067B2Ion implantation apparatus and method of converging/shaping ion beam used thereforSEN CORP·Filed 2008·Granted Jul 13, 2010·6 cites·19 claims
- 1079US9305784B2Ion implantation method and ion implantation apparatusSEN CORP·Filed 2013·Granted Apr 5, 2016·5 cites·15 claims
- 1179US8987690B2High-energy ion implanterSEN CORP·Filed 2014·Granted Mar 24, 2015·4 cites·19 claims
- 1275US7718980B2Beam processing system and beam processing methodSEN CORP·Filed 2007·Granted May 18, 2010·5 cites·8 claims
- 1371US9646837B2Ion implantation method and ion implantation apparatusSEN CORP·Filed 2012·Granted May 9, 2017·3 cites·5 claims
- 1465US9153405B2Ion source device and ion beam generating methodSEN CORP·Filed 2013·Granted Oct 6, 2015·1 cites·11 claims
- 1563US8980654B2Ion implantation method and ion implantation apparatusSEN CORP·Filed 2013·Granted Mar 17, 2015·1 cites·10 claims
- 1663US8759801B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2012·Granted Jun 24, 2014·1 cites·9 claims
- 1754US9153406B2Supporting structure and ion generator using the sameSEN CORP·Filed 2014·Granted Oct 6, 2015·0 cites·8 claims
- 1848US2017148633A1Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2017·Application pending·0 cites
- 1946US9208996B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2013·Granted Dec 8, 2015·0 cites·28 claims
- 2044US9117627B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2014·Granted Aug 25, 2015·0 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when SEN CORP files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →