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SEN CORP
US19 patents
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US6271620B1Aug 7, 2001
Acoustic transducer and method of making the same
SEN CORP79 citations96
US9117630B2Aug 25, 2015
Insulation structure of high voltage electrodes for ion implantation apparatus
SEN CORP7 citations84
US7361892B2Apr 22, 2008
Method to increase low-energy beam current in irradiation system with ion beam
SEN CORP12 citations84
US9281160B2Mar 8, 2016
Insulation structure and insulation method
SEN CORP7 citations83
US9208983B2Dec 8, 2015
Ion generation method and ion source
SEN CORP8 citations83
US8692216B2Apr 8, 2014
Ion implantation apparatus and control method thereof
SEN CORP11 citations80
US8987690B2Mar 24, 2015
High-energy ion implanter
SEN CORP4 citations72
US8952340B2Feb 10, 2015
High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision
SEN CORP5 citations72
US9165772B2Oct 20, 2015
Ion implantation method and ion implantation apparatus
SEN CORP4 citations71
US9646837B2May 9, 2017
Ion implantation method and ion implantation apparatus
SEN CORP3 citations70
US9305784B2Apr 5, 2016
Ion implantation method and ion implantation apparatus
SEN CORP5 citations70
US7718980B2May 18, 2010
Beam processing system and beam processing method
SEN CORP5 citations62
US7755067B2Jul 13, 2010
Ion implantation apparatus and method of converging/shaping ion beam used therefor
SEN CORP6 citations61
US9153406B2Oct 6, 2015
Supporting structure and ion generator using the same
SEN CORP0 citations51
US9153405B2Oct 6, 2015
Ion source device and ion beam generating method
SEN CORP1 citations51
US8759801B2Jun 24, 2014
Ion implantation apparatus and ion implantation method
SEN CORP1 citations51
US8980654B2Mar 17, 2015
Ion implantation method and ion implantation apparatus
SEN CORP1 citations50
US9117627B2Aug 25, 2015
Ion implantation apparatus and ion implantation method
SEN CORP0 citations46
US9208996B2Dec 8, 2015
Ion implantation apparatus and ion implantation method
SEN CORP0 citations41