Assignee
SENDA SHINICHIRO
JP·2 granted patents·1 pending application·7 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0187US9085819B2Tantalum sputtering targetSENDA SHINICHIRO·Filed 2011·Granted Jul 21, 2015·5 cites·18 claims
- 0267US9051645B2Barrier film for semiconductor wiring, sintered compact sputtering target and method of producing the sputtering targetSENDA SHINICHIRO·Filed 2010·Granted Jun 9, 2015·2 cites·14 claims
- 0346US2013098759A1Tantalum Sputtering TargetSENDA SHINICHIRO·Filed 2011·Application pending·0 cites
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