Assignee
SENTEC CORP
US8 patents
Top patents by PatentIndex Score
US5987995ANov 23, 1999
Fiber optic pressure catheter
SENTEC CORP161 citations98
US5923423AJul 13, 1999
Heterodyne scatterometer for detecting and analyzing wafer surface defects
SENTEC CORP162 citations96
US6868736B2Mar 22, 2005
Ultra-miniature optical pressure sensing system
SENTEC CORP96 citations95
US6141098AOct 31, 2000
Fiber optic temperature sensor
SENTEC CORP54 citations95
US5982288ANov 9, 1999
Visibility sensor system
SENTEC CORP76 citations93
US6330519B1Dec 11, 2001
Visibility sensor system
SENTEC CORP25 citations92
US5870511AFeb 9, 1999
Fiber optic temperature sensor
SENTEC CORP54 citations92
US6597446B2Jul 22, 2003
Holographic scatterometer for detection and analysis of wafer surface deposits
SENTEC CORP39 citations90