Assignee
SESHIMO TAKEHIRO
JP·4 granted patents·25 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0187US8206891B2Positive resist composition and method of forming resist patternSESHIMO TAKEHIRO·Filed 2009·Granted Jun 26, 2012·10 cites·6 claims
- 0281US8124313B2Resist composition, method of forming resist pattern, novel compound, and acid generatorSESHIMO TAKEHIRO·Filed 2010·Granted Feb 28, 2012·11 cites·19 claims
- 0371US8932795B2Resist composition, method of forming resist pattern, novel compound, and acid generatorSESHIMO TAKEHIRO·Filed 2011·Granted Jan 13, 2015·2 cites·6 claims
- 0470US8298748B2Positive resist composition, method of forming resist pattern, and polymeric compoundSESHIMO TAKEHIRO·Filed 2010·Granted Oct 30, 2012·2 cites·6 claims
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