Assignee
SHANNON STEVEN C
US·4 granted patents·64 citations·filing 2006–2011
Top patents by PatentIndex Score
4 records- 0194US8092605B2Magnetic confinement of a plasmaSHANNON STEVEN C·Filed 2006·Granted Jan 10, 2012·37 cites·22 claims
- 0289US8337661B2Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of an unmatched low power RF generatorSHANNON STEVEN C·Filed 2008·Granted Dec 25, 2012·12 cites·7 claims
- 0389US8324525B2Method of plasma load impedance tuning for engineered transients by synchronized modulation of a source power or bias power RF generatorSHANNON STEVEN C·Filed 2008·Granted Dec 4, 2012·12 cites·18 claims
- 0474US8237517B2Apparatus for multiple frequency power applicationSHANNON STEVEN C·Filed 2011·Granted Aug 7, 2012·3 cites·20 claims
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