Assignee
SHI RUIFANG
US·2 granted patents·13 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0185US8103086B2Reticle defect inspection with model-based thin line approachesSHI RUIFANG·Filed 2010·Granted Jan 24, 2012·7 cites·28 claims
- 0283US8611637B2Wafer plane detection of lithographically significant contamination photomask defectsSHI RUIFANG·Filed 2010·Granted Dec 17, 2013·6 cites·21 claims
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