Assignee
SHIBAGAKI MASAMI
JP6 patents
Top patents by PatentIndex Score
US8147242B2Apr 3, 2012
Substrate supporting/transferring tray
SHIBAGAKI MASAMI544 citations97
US8198182B2Jun 12, 2012
Annealing method for semiconductor device with silicon carbide substrate and semiconductor device
SHIBAGAKI MASAMI2 citations60
US8187958B2May 29, 2012
Substrate processing method and method of manufacturing crystalline silicon carbide (SIC) substrate
SHIBAGAKI MASAMI3 citations56
US8090245B2Jan 3, 2012
Apparatus for heat-treating substrate and method for heat-treating substrate
SHIBAGAKI MASAMI1 citations51
US9431281B2Aug 30, 2016
Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium
SHIBAGAKI MASAMI1 citations47
US8691676B2Apr 8, 2014
Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording medium
SHIBAGAKI MASAMI1 citations47