Assignee

SHIBAHARA TAKUMA

JP·2 granted patents·6 citations·filing 2011–2012

Technology mixG01B2 H01J2 H01L2 H10P2 G01N1 G03F1

Top patents by PatentIndex Score

2 records

0173US8942464B2Pattern measuring apparatus, and pattern measuring method and programSHIBAHARA TAKUMA·Filed 2011·Granted Jan 27, 2015·4 cites·9 claims
0266US8959461B2Pattern measurement device and pattern measurement methodSHIBAHARA TAKUMA·Filed 2012·Granted Feb 17, 2015·2 cites·11 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →