Assignee
SHIBAURA MECHATRONICS CORP
JP138 patents
Top patents by PatentIndex Score
US7301286B2Nov 27, 2007
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
SHIBAURA MECHATRONICS CORP33 citations95
US6416638B1Jul 9, 2002
Power supply unit for sputtering device
SHIBAURA MECHATRONICS CORP67 citations94
US7075036B2Jul 11, 2006
Electronic part compression bonding apparatus and method
SHIBAURA MECHATRONICS CORP33 citations92
US7149341B2Dec 12, 2006
Wafer inspection apparatus
SHIBAURA MECHATRONICS CORP26 citations89
US6337003B1Jan 8, 2002
Vacuum apparatus and driving mechanism therefor
SHIBAURA MECHATRONICS CORP30 citations89
US6189591B1Feb 20, 2001
Wafer sheet expanding apparatus and pellet bonding apparatus using thereof
SHIBAURA MECHATRONICS CORP38 citations89
US6363950B2Apr 2, 2002
Apparatus for processing substrate using process solutions having desired mixing ratios
SHIBAURA MECHATRONICS CORP19 citations88
US6299697B1Oct 9, 2001
Method and apparatus for processing substrate
SHIBAURA MECHATRONICS CORP21 citations88
US7403278B2Jul 22, 2008
Surface inspection apparatus and surface inspection method
SHIBAURA MECHATRONICS CORP21 citations87
US10026760B2Jul 17, 2018
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP8 citations84
US6113760ASep 5, 2000
Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus
SHIBAURA MECHATRONICS CORP23 citations84
US7367601B2May 6, 2008
Substrate transfer apparatus and substrate transfer method
SHIBAURA MECHATRONICS CORP16 citations83
US7114245B2Oct 3, 2006
Component holding head, component mounting apparatus using same, and component mounting method
SHIBAURA MECHATRONICS CORP15 citations83
US9964358B2May 8, 2018
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP7 citations82
US9811096B2Nov 7, 2017
Liquid feeding device and substrate treating device
SHIBAURA MECHATRONICS CORP9 citations81
US6192903B1Feb 27, 2001
Spin-processing apparatus and spin-processing method
SHIBAURA MECHATRONICS CORP17 citations81
US7531070B2May 12, 2009
Sputtering power-supply unit
SHIBAURA MECHATRONICS CORP10 citations79
US6851460B2Feb 8, 2005
Liquid crystal dropping apparatus and method, and liquid crystal display panel producing apparatus
SHIBAURA MECHATRONICS CORP17 citations77
US6623577B2Sep 23, 2003
Electric component compression bonding machine and method
SHIBAURA MECHATRONICS CORP13 citations77
US10804121B2Oct 13, 2020
Substrate treatment apparatus, substrate treatment method, and method for manufacturing substrate
SHIBAURA MECHATRONICS CORP2 citations73
US10319602B2Jun 11, 2019
Substrate treatment method and substrate treatment apparatus
SHIBAURA MECHATRONICS CORP2 citations73
US9679787B2Jun 13, 2017
Spin treatment apparatus
SHIBAURA MECHATRONICS CORP5 citations73
US10460961B2Oct 29, 2019
Substrate processing apparatus
SHIBAURA MECHATRONICS CORP3 citations72
US10281210B2May 7, 2019
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP4 citations72
US9607865B2Mar 28, 2017
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP2 citations72
US9553003B2Jan 24, 2017
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP6 citations72
US11127574B2Sep 21, 2021
Plasma processing apparatus
SHIBAURA MECHATRONICS CORP3 citations71
US9586391B2Mar 7, 2017
Bonding apparatus and method for manufacturing bonded substrate
SHIBAURA MECHATRONICS CORP3 citations71
US12097541B2Sep 24, 2024
Substrate processing apparatus
SHIBAURA MECHATRONICS CORP2 citations70
US9795999B2Oct 24, 2017
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP2 citations70
US7462578B2Dec 9, 2008
Method and apparatus for producing photocatalyst
SHIBAURA MECHATRONICS CORP5 citations70
US11387082B2Jul 12, 2022
Plasma processing apparatus
SHIBAURA MECHATRONICS CORP2 citations69
US11387083B2Jul 12, 2022
Plasma processing apparatus
SHIBAURA MECHATRONICS CORP2 citations69
US6377866B2Apr 23, 2002
Device for engraving and inspecting a semiconductor wafer identification mark
SHIBAURA MECHATRONICS CORP11 citations69
US10486440B2Nov 26, 2019
Tablet printing apparatus
SHIBAURA MECHATRONICS CORP2 citations68
US10220640B2Mar 5, 2019
Tablet printing apparatus
SHIBAURA MECHATRONICS CORP2 citations67
US10586727B2Mar 10, 2020
Suction stage, lamination device, and method for manufacturing laminated substrate
SHIBAURA MECHATRONICS CORP3 citations66
US8023111B2Sep 20, 2011
Surface inspection apparatus
SHIBAURA MECHATRONICS CORP3 citations63
US7950434B2May 31, 2011
Adhesive tape adhering apparatus
SHIBAURA MECHATRONICS CORP2 citations63
US12354854B2Jul 8, 2025
Film formation apparatus
SHIBAURA MECHATRONICS CORP0 citations61
US11609491B2Mar 21, 2023
Reflective mask cleaning apparatus and reflective mask cleaning method
SHIBAURA MECHATRONICS CORP0 citations61
US10607863B2Mar 31, 2020
Substrate processing apparatus
SHIBAURA MECHATRONICS CORP1 citations61
US7679730B2Mar 16, 2010
Surface inspection apparatus and surface inspection method for strained silicon wafer
SHIBAURA MECHATRONICS CORP5 citations61
US7491908B2Feb 17, 2009
Plasma processing device and ashing method
SHIBAURA MECHATRONICS CORP4 citations61
US7010852B2Mar 14, 2006
Apparatus and method for carrying substrate
SHIBAURA MECHATRONICS CORP3 citations61
US6857182B1Feb 22, 2005
Mounting system for mounting an electronic component on a substrate
SHIBAURA MECHATRONICS CORP3 citations61
US6694608B2Feb 24, 2004
Part mounter
SHIBAURA MECHATRONICS CORP2 citations61
US6631557B2Oct 14, 2003
Method and apparatus for mounting electronic device
SHIBAURA MECHATRONICS CORP3 citations61
US6557246B2May 6, 2003
Part mounting device and part mounting method
SHIBAURA MECHATRONICS CORP2 citations61
US11155101B2Oct 26, 2021
Tablet printing apparatus and heat dissipation method thereof
SHIBAURA MECHATRONICS CORP0 citations60
Showing the top 50 of 138 patents by PatentIndex Score.