Assignee
SHIDA HIROTAKA
JP·3 granted patents·12 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0174US8480920B2Chemical mechanical polishing aqueous dispersion, method of preparing the same, chemical mechanical polishing aqueous dispersion preparation kit, and chemical mechanical polishing methodSHIDA HIROTAKA·Filed 2010·Granted Jul 9, 2013·4 cites·15 claims
- 0270US8119517B2Chemical mechanical polishing method and method of manufacturing semiconductor deviceSHIDA HIROTAKA·Filed 2009·Granted Feb 21, 2012·3 cites·15 claims
- 0369US8506359B2Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing methodSHIDA HIROTAKA·Filed 2009·Granted Aug 13, 2013·5 cites·29 claims
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