Assignee
SHIGEMATSU KOJI
JP·2 granted patents·1 citations·filing 2008–2011
Top patents by PatentIndex Score
2 records- 0158US8325324B2Illuminating optical apparatus, exposure apparatus and device manufacturing methodSHIGEMATSU KOJI·Filed 2008·Granted Dec 4, 2012·1 cites·31 claims
- 0249US8934086B2Illumination optical system, exposure apparatus and device manufacturing methodSHIGEMATSU KOJI·Filed 2011·Granted Jan 13, 2015·0 cites·32 claims
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