Assignee
SHIH HONG
US·13 granted patents·3 pending applications·220 citations·filing 2000–2012
Top patents by PatentIndex Score
16 records- 0196US8292698B1On-line chamber cleaning using dry ice blastingSHIH HONG·Filed 2007·Granted Oct 23, 2012·67 cites·20 claims
- 0295US6808747B1Coating boron carbide on aluminumSHIH HONG·Filed 2000·Granted Oct 26, 2004·134 cites·22 claims
- 0381US8215321B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesSHIH HONG·Filed 2011·Granted Jul 10, 2012·3 cites·18 claims
- 0481US8097105B2Extending lifetime of yttrium oxide as a plasma chamber materialSHIH HONG·Filed 2007·Granted Jan 17, 2012·5 cites·11 claims
- 0577US9079228B2Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamberSHIH HONG·Filed 2010·Granted Jul 14, 2015·2 cites·13 claims
- 0675US8679252B2Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereofSHIH HONG·Filed 2005·Granted Mar 25, 2014·5 cites·10 claims
- 0773US8585844B2Extending lifetime of yttrium oxide as a plasma chamber materialSHIH HONG·Filed 2011·Granted Nov 19, 2013·2 cites·12 claims
- 0864US8545639B2Method of cleaning aluminum plasma chamber partsSHIH HONG·Filed 2011·Granted Oct 1, 2013·1 cites·19 claims
- 0963US8143904B2System and method for testing an electrostatic chuckSHIH HONG·Filed 2008·Granted Mar 27, 2012·1 cites·10 claims
- 1062US8216388B2Extending storage time of removed plasma chamber components prior to cleaning thereofSHIH HONG·Filed 2011·Granted Jul 10, 2012·0 cites·20 claims
- 1151US9082805B2System and method for testing an electrostatic chuckSHIH HONG·Filed 2012·Granted Jul 14, 2015·0 cites·6 claims
- 1250US2013160948A1Plasma Processing Devices With Corrosion Resistant ComponentsSHIH HONG·Filed 2012·Application pending·0 cites
- 1349US8291565B2Method of refurbishing bipolar electrostatic chuckSHIH HONG·Filed 2008·Granted Oct 23, 2012·0 cites·19 claims
- 1446US9054148B2Method for performing hot water seal on electrostatic chuckSHIH HONG·Filed 2011·Granted Jun 9, 2015·0 cites·12 claims
- 1546US2013105083A1Systems Comprising Silicon Coated Gas Supply Conduits And Methods For Applying CoatingsSHIH HONG·Filed 2011·Application pending·0 cites
- 1642US2005274396A1Methods for wet cleaning quartz surfaces of components for plasma processing chambersSHIH HONG·Filed 2004·Application pending·0 cites
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