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SHIMAI FUTOSHI

JP3 patents

Top patents by PatentIndex Score

US8807072B2Aug 19, 2014

Coating device

SHIMAI FUTOSHI10 citations82

US8189169B2May 29, 2012

Cooling apparatus and substrate treating apparatus

SHIMAI FUTOSHI1 citations47

US9010270B2Apr 21, 2015

Coating device including substrate carrying, application and removal units

SHIMAI FUTOSHI0 citations39