Assignee

SHIMIZU NOBURU

JP·2 granted patents·40 citations·filing 2007–2009

Technology mixB24B2 B24D1 G01B1 G01N1 G05B1 H10P1

Top patents by PatentIndex Score

2 records

0192US8554356B2Processing end point detection method, polishing method, and polishing apparatusSHIMIZU NOBURU·Filed 2007·Granted Oct 8, 2013·25 cites·9 claims
0288US8157616B2Polishing end point detection methodSHIMIZU NOBURU·Filed 2009·Granted Apr 17, 2012·15 cites·14 claims

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