Assignee

SHIMIZU TAKAAKI

JP·1 granted patent·15 citations·filing 2008–2008

Technology mixC01B1

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1 record

0187US8293076B2Method for producing trichlorosilane and method for producing polycrystalline siliconSHIMIZU TAKAAKI·Filed 2008·Granted Oct 23, 2012·15 cites·9 claims

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